| 1. | Mems ( micro electromechanical system ) has become one of the most rapidly development technologies . along with the rapid development of mems techniques , capacitive sensor is used widely whose capacitance changes small , which has put forward the new request to the measurement technique . the common measure for capacitance measurement is that convert capacitance to voltage , electric current or frequency . the area of polar plate of the capacitor becomes smaller and smaller , and the total capacitance of micro capacitive sensor is usually several pico farad only . as a result , its change amount is smaller
Mems ( microelectromechanicalsystem )近年来发展最快的技术之一,随着mems技术的快速发展,电容式加速度计的电容变化变化量越来越小,对检测技术提出了新的要求。在电容式传感器中,常用电容检测电路是将其转换为电压、电流或者频率信号。目前的微型电容传感器的极板面积变得越来越小,电容总量只有几个pf ,变化量就更小。 |
